Equinox-Fab-TT

The Equinox-Fab-TT is a high-throughput Laser-based Production Tool for c-Si Manufacturing.

Simultaneous processing on 4 wafers via multi-station turntable
Enable high-efficiency cell concepts with increased yield levels
Major Applications include Edge Isolation, Dielectric Ablation, Laser Doping, and Wrap-Through
Incorporates state-of-the-art industrialqualified turn-key solid-state lasers
Wide range of laser wavelengths and powers, including high-power UV options
Minimal facilities requirements Four high-speed XY scanners each processing at >7m/s
Vibration-isolated granite optical bench for optimal process control
No hazardous chemicals, no process liquids or gases, no industrial water supply
Entire solution from single supplier with track-record extending over 40 years
Worldwide service and support network

Please contact us for assistance with your requirements.